Qualitative approach
FUTEX is trying to increase the customerﾕs satisfaction by
supplying high voltage power supply or the product using electrical
applications with latest technology meeting with the market
requirements.. Please see the below as one of the example
FUTEX has done. |
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Quality approach of high voltage power supply |
Case 1: Controlling ion beam from FIB.
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IB303series high voltage power supply is able to useful
for this requirement. IB303 series is designed for getting
the ion beam as being configured gun control and lens control
as well. It is configured accelerating voltage power supply,
filament current power supply, suppressor voltage power supply
and extracts voltage power supply. Also two lenses voltage
power supplies can be configured as an option. |
Case 2: Setting up the TFE electron gun using high quality power supply.
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FE303XPA is the best choice for this application. The accelerating
voltage power supply in this power supply has been designed
as ultra-high voltage stability and ultra- low ripple noise.
Also FE303XPA can setup the necessary parameter of TFE gun
individually. The FE303XPA can be redesigned based on the
customerﾕs specification. So that FE303XPA is the best high
voltage power supply for the customerﾕs research or experiment.
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Case 3: The feature of FUTEX power supply for the electron gun or ion gun.
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The power supply for the electron gun or ion gun has not
been assembled the high voltage power supply module. FUTEX
considers that the high voltage power supply for electron
gun or ion gun must be designed as system. For instance the
floating structures to prevent discharge or the design which
make a discharge route are the feature of FUTEX technology.
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Case 4: The software for controlling the electron beam application system.
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FUTEX has provided the software for controlling FE303 series
power supply for electron gum and IB303 series power supply
for ion gun. The software can set up the voltage or current
also show the voltage or current for every power supply. The
software has the editor called sequential editor on graphical
display which can make start up the every function in sequential.
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Case 5: Is it possible to make the semiconductor inspection instrument using electron gun application?
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Yes, it is possible. FUTEX can provide not only the electron
gun configuration but also control system, astigmatism correction
system, alignment system, scanning system, magnetic lens system,
retarding plate system and wafer chucking system. FUTEX cam
make the power supply based on the customerﾕs specification.
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Case 6: Is it possible to make the power supply for special electron gun?
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Yes, it is possible to propose the specification of the
power supply or the other function unit meeting the customerﾕs
specification then FUTEX proposes the configuration of the
system modulation for every function. If the proposal has
been agreed, FUTEX starts designing and developing the system.
For instance it is possible to propose input receiver unit
or source power supply as system integration. |
Case 6: Is it possible to make the special order high voltage power supply?
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Yes, it is possible. For instance in the application of
charged particle beam, the lens functions are required in
almost cases. FUTEX has experience of the magnetic field lens
power supply (constant current power supply). The voltage
stability is possible to be guaranteed less than 10ppm in
these cases. |
Case 8: In case of X-ray system applications, what FUTEX can make the instrument for it?
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FUTEX has developed cold cathode X-ray generator system
with Onitsuka Glass Ltd which has contract of an alliance
with FUTEX. The system is functioning less than 20kV in 2011/Apr
but there is the plan for development of higher energy X-ray
generator. Configurations: X-ray tube, the specified power
supply, the specified cable. (Please ask the detail for sending
e-mail). |
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